Micro/Nano Electromechanical Systems and Sensors

We are interested in designing micro/nanoelectromechanical systems (M/NEMS) and sensors using these systems by exploiting the full range of behaviour of these devices as well as results from nonlinear dynamics.


Our interest in such systems stems from our earlier research developing analogue interfaces to such systems. However, traditional M/NEMS design is prone to a number of undesirable effects including coupling and nonlinearity. Such effects severely limit the usability of the built devices, particularly with reducing dimensions to nanometers.  Nanometer scale devices allow us to manufacture a large number of sensors on a small chip area, thereby significantly reducing the cost per sensor and increasing the throughput. However, such arrangements often lead to an undesirable coupling between the devices, which diminishes the performance of individual devices. Furthermore, reducing physical dimensions often lead to increasing nonlinearity in mechanical sensors, which further reduces the usability of these sensors.

We are interested in designing systems which utilise such ignored and avoided effects to develop new design philosophies as well as sensing mechanisms. Our research till date has utilised both coupling between a number of devices as well as nonlinearity in their response to design improved devices. In particular, we utilise several mathematical techniques (for example Inverse Eigenvalue Analysis, Perturbation Analysis and Monte Carlo techniques) as well as results from nonlinear dynamics community in micro/nano systems.

Current and Future Projects

  • Exploiting Emergent Collective Behaviours in M/NEMS Systems
  • Sensitivity enhancement of M/NEMS resonator sensors
  • Exploiting Non-linear Behaviour of M/NEMS Structures
  • Develop single chip solutions for large number of biomedical and environmental sensors
  • Experimental verification of results from Nonlinear Dynamics
  • Use mechanical computation and logic in M/NEMS